Development and Up-Scaling of the hot filament process for diamond CVD
Research of hot-filament CVD technology constantly continues to provide new scientific developments that are transferred into economically functioning products. This business model enabled the establishment of the worldwide largest experimental CVD facility.
- Upscaling of the hot-filament diamond surface area up to 10.000cm2.
- Flexible chamber set up to coat small (weight < 1 g) as well as large components (weight > 40 kg) via CVD.
- Reduction of energy input (electric power/carat) for hot-filament CVD.
- Homogenisation of diamond growth rate and boron doping for a 2D and 3D substrates.
- Reproducible substrate temperature ranging from 650 °C to 950 °C.
- Integration of heat treatment during the hot-filament process.
- Development of in-situ measurements, e.g. online measurement of diamond growth rate.
Contact:apl. Prof. Dr.-Ing. habil. Stefan M. Rosiwal
Self-supporting nanocrystalline diamond foils: Influence of template morphologies on the mechanical properties measured by ball on three balls testing
In: Acta Materialia 59 (2011), p. 3343-3351
DOI: 10.1016/j.actamat.2011.02.009 , , , :
Monitoring oxygen species in diamond hot-filament CVD by zircon dioxide sensors
In: Vacuum 82 (2008), p. 599-607
DOI: 10.1016/j.vacuum.2007.09.002 , , :
Improved flow conditions in diamond hot filament CVD-Promising deposition results and gas phase characterization by laser absorption spectroscopy
In: Vacuum 81 (2007), p. 619-626
DOI: 10.1016/j.vacuum.2006.08.004 , , , , , , :
Diamond single crystal growth in hot filament CVD
In: Diamond and Related Materials 15 (2006), p. 536-541
DOI: 10.1016/j.diamond.2006.01.003 , , , , :
Chemical vapor infiltration (CVI) - Part II: Infiltration of porous substrates with diamond by using a new designed hot-filament plant
In: Diamond and Related Materials 15 (2006), p. 49-54
DOI: 10.1016/j.diamond.2005.07.010 , , :