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  5. Development and Up-Scaling of the hot filament process for diamond CVD

Development and Up-Scaling of the hot filament process for diamond CVD

In page navigation: Research
  • Additive Manufacturing
    • Alloy development for additiv manufacturing
    • Cellular mechanical metamaterials
    • Development of process strategies
    • Expansion of the capability of SEBM by improved electron beam technology
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    • Investment casting and high temperature alloys
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      • Alloy development for high pressure die casting
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      • Diamond coating of molds and tools
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      • Development and Up-Scaling of the hot filament process for diamond CVD
      • Alloying of metals and metal compounds in diamond CVD facilities
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Development and Up-Scaling of the hot filament process for diamond CVD

Research of hot-filament CVD technology constantly continues to provide new scientific developments that are transferred into economically functioning products. This business model enabled the establishment of the worldwide largest experimental CVD facility.

Development details:

  • Upscaling of the hot-filament diamond surface area up to 10.000cm2.
  • Flexible chamber set up to coat small (weight < 1 g) as well as large components (weight > 40 kg) via CVD.
  • Reduction of energy input (electric power/carat) for hot-filament CVD.
  • Homogenisation of diamond growth rate and boron doping for a 2D and 3D substrates.
  • Reproducible substrate temperature ranging from 650 °C to 950 °C.
  • Integration of heat treatment during the hot-filament process.
  • Development of in-situ measurements, e.g. online measurement of diamond growth rate.
(Enlarge)
(Enlarge)
facetted growth of the diamond seeds
(Enlarge)
facetted growth of the diamond coating
(Enlarge)
facetted growth of the diamond seeds
facetted growth of the diamond coating

Contact:

apl. Prof. Dr.-Ing. habil. Stefan M. Rosiwal

Publications:

  • Ramakrishnan R., Lodes M., Rosiwal S., Singer R.:
    Self-supporting nanocrystalline diamond foils: Influence of template morphologies on the mechanical properties measured by ball on three balls testing
    In: Acta Materialia 59 (2011), p. 3343-3351
    ISSN: 1359-6454
    DOI: 10.1016/j.actamat.2011.02.009
  • Hirmke J., Rosiwal S., Singer R.:
    Monitoring oxygen species in diamond hot-filament CVD by zircon dioxide sensors
    In: Vacuum 82 (2008), p. 599-607
    ISSN: 0042-207X
    DOI: 10.1016/j.vacuum.2007.09.002
  • Hirmke J., Glaser A., Hempel F., Stancu GD., Röpcke J., Rosiwal S., Singer R.:
    Improved flow conditions in diamond hot filament CVD-Promising deposition results and gas phase characterization by laser absorption spectroscopy
    In: Vacuum 81 (2007), p. 619-626
    ISSN: 0042-207X
    DOI: 10.1016/j.vacuum.2006.08.004
  • Hirmke J., Schwarz S., Rottmair CA., Rosiwal S., Singer R.:
    Diamond single crystal growth in hot filament CVD
    In: Diamond and Related Materials 15 (2006), p. 536-541
    ISSN: 0925-9635
    DOI: 10.1016/j.diamond.2006.01.003
  • Glaser A., Rosiwal S., Singer R.:
    Chemical vapor infiltration (CVI) - Part II: Infiltration of porous substrates with diamond by using a new designed hot-filament plant
    In: Diamond and Related Materials 15 (2006), p. 49-54
    ISSN: 0925-9635
    DOI: 10.1016/j.diamond.2005.07.010



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