Development and Up-Scaling of the hot filament process for diamond CVD
Research of hot-filament CVD technology constantly continues to provide new scientific developments that are transferred into economically functioning products. This business model enabled the establishment of the worldwide largest experimental CVD facility.
Development details:
- Upscaling of the hot-filament diamond surface area up to 10.000cm2.
- Flexible chamber set up to coat small (weight < 1 g) as well as large components (weight > 40 kg) via CVD.
- Reduction of energy input (electric power/carat) for hot-filament CVD.
- Homogenisation of diamond growth rate and boron doping for a 2D and 3D substrates.
- Reproducible substrate temperature ranging from 650 °C to 950 °C.
- Integration of heat treatment during the hot-filament process.
- Development of in-situ measurements, e.g. online measurement of diamond growth rate.
Contact:
apl. Prof. Dr.-Ing. habil. Stefan M. Rosiwal
Publications:
Self-supporting nanocrystalline diamond foils: Influence of template morphologies on the mechanical properties measured by ball on three balls testing
In: Acta Materialia 59 (2011), p. 3343-3351
ISSN: 1359-6454
DOI: 10.1016/j.actamat.2011.02.009 , , , :
Monitoring oxygen species in diamond hot-filament CVD by zircon dioxide sensors
In: Vacuum 82 (2008), p. 599-607
ISSN: 0042-207X
DOI: 10.1016/j.vacuum.2007.09.002 , , :
Improved flow conditions in diamond hot filament CVD-Promising deposition results and gas phase characterization by laser absorption spectroscopy
In: Vacuum 81 (2007), p. 619-626
ISSN: 0042-207X
DOI: 10.1016/j.vacuum.2006.08.004 , , , , , , :
Diamond single crystal growth in hot filament CVD
In: Diamond and Related Materials 15 (2006), p. 536-541
ISSN: 0925-9635
DOI: 10.1016/j.diamond.2006.01.003 , , , , :
Chemical vapor infiltration (CVI) - Part II: Infiltration of porous substrates with diamond by using a new designed hot-filament plant
In: Diamond and Related Materials 15 (2006), p. 49-54
ISSN: 0925-9635
DOI: 10.1016/j.diamond.2005.07.010 , , :
Gas-phase characterization in diamond hot-filament CVD by infrared tunable diode laser absorption spectroscopy
In: Vacuum 80 (2006), p. 967-976
ISSN: 0042-207X
DOI: 10.1016/j.vacuum.2005.12.009 , , , , , :
CVD-diamond single-crystal growth
In: Journal of Crystal Growth 271 (2004), p. 425-434
ISSN: 0022-0248
DOI: 10.1016/j.jcrysgro.2004.08.003
URL: http://www.sciencedirect.com/science?_ob=ArticleURL&_udi=B6TJ6-4DN2F3G-2&_user=616145&_coverDate=11%2F15%2F2004&_alid=882231821&_rdoc=5&_fmt=high&_orig=search&_cdi=5302&_sort=d&_docanchor=&view=c&_ct=5&_acct=C000032322&_version=1&_urlVersion=0&_userid=616145&md5=aab768e5088b5cd3b830778b911906c1 , , , , :
Chemical vapor infiltration (CVI)-Part I: A new technique to achieve diamond composites
In: Diamond and Related Materials 13 (2004), p. 834-838
ISSN: 0925-9635
DOI: 10.1016/j.diamond.2003.10.041 , , , :
Herstellung neuartiger Substratwerkstoffe durch Infiltration mit Diamant aus der Gasphase
14. Symposium Verbundwerkstoffe und Werkstoffverbunde , , :
Dependence of the growth rate, quality and morphology of diamond coatings on the pressure during the CVD-process in an industrial hot-filament plant
In: Diamond and Related Materials (2002), p. 589-595
ISSN: 0925-9635
DOI: 10.1016/S0925-9635(01)00702-6
URL: http://www.sciencedirect.com/science?_ob=ArticleURL&_udi=B6WW2-46922JT-2R&_user=616145&_coverDate=07%2F15%2F2002&_alid=61213825&_rdoc=4&_fmt=summary&_orig=search&_cdi=7118&_sort=d&_st=4&_docanchor=&_acct=C000032322&_version=1&_urlVersion=0&_userid=616145&md5=96e19a3f085215738b5c6e838997cee5 , , , , :
Diamond Coatings as Wear Protection for Metallic Devices with Complex Geometry
In: S. Rosiwal (ed.): FOROB II Abschlußbericht, 2001, p. 33-50 , , , :
High growth rate and high quality CVD diamond growth
Applied Diamond Coating / Frontier Carbon Technology (Auburn)
In: Applied Diamond Coating / Frontier Carbon Technology 2001 , , , :
3D-Diamantbeschichtung von Titanbauteilen
Werkstoffwoche 98 (München, 12. October 1998 - 15. October 1998)
In: H. Dimigen, W. Paatsch (ed.): Oberflächentechnik / Werkstoffwoche 98, Symposium 11 1999 , , , , :
3D-Diamantbeschichtung von Titanverdichterschaufeln in Flugtriebwerken
Workshop Hochleistungsschichten für Verbrennungsmotoren (Frankfurt/Main) , , , :
Well adherent and morphologically controlled diamond coatings on three dimensional engineering components: A physicists dream or an engineer's reality?
International Confernce on Metallurgical Coatings and Thin Films (San Diego) , , , , , :
CVD-Diamantschichten als Verschleißschutz von Metallen
2. Industriefachtagung Oberflächen- und Wärmebehandlungstechnik OWT'97 (Chemnitz) , , , , , :